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EE618A: Integrated Circuit Fabrication Technology

Course Content

  •  Overview of Semiconductor Physics and Devices
  •  CMOS Process Flow
  •  Crystal growth and doping
  •  Unit processes: Lithography,  doping, etching …
  •  Thin film growth
  •  Back-end technology
  •  Modern Technologies (Advanced Technology Nodes, HEMTs, MEMS …)

Outcomes of this Course

- To understand basic unit processes of integrated circuit fabrication and process integration.

- Learning about various engineering possibilities in integrated circuit fabrication and challenges.